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  4. MC-4 Multi-Modular Cleaner: UV Light, Plasma and Heating for SEM and TEM Samples

MC-4 Multi-Modular Cleaner: UV Light, Plasma and Heating for SEM and TEM Samples

UV Light, Plasma and Heating for SEM and TEM Samples.

Rave Scientific offers the MC-4 Multi-Purpose Cleaner, the first of its kind to combine UV light, plasma and vacuum treatment heating all in one system. Contamination sometimes can be stubborn and not easily addressed, especially for high resolution TEM analysis. The MC-4 not only addresses SEM sample cleaning but can also accommodate up to two TEM sample holders for storage and cleaning. Here is a summary of the modes:

 

UV Light Cleaning

  • UV Light provides gentle and non-destructive cleaning for beam sensitive samples. Samples.
  • The MC-4 provides two wavelengths (185nm and 254nm) of UV light simultaneously irradiating the sample chamber where oxygen is leaked in.
  • High concentration, highly active oxygen radicals are generated in the sample chamber. Surface hydrocarbon (buildup) reacts with oxygen radicals to decompose into smaller species, then being pumped away.
 

Plasma Cleaning

  • The MC-4 generates plasma with much higher particle density than traditional capacitive coupled technology.
  • The high concentration of oxygen radicals generated can efficiently remove surface hydrocarbon contaminants on the samples.
  • The “Downstream" cleaning approach provides no damage to the sample and preserves original surface morphology.
 

HEATING-VACUUMING CLEANING

  • The MC-4 sample chamber can be heated quickly, up to 150℃ under vacuum so that adsorbed hydrocarbon species can be removed by desorption.
  • High-precision temperature control with accuracy within ±1℃.
  • Chamber vacuum can be configured at low vacuum mode(10-2Torr) or high vacuum mode (10-5 Torr) for different desorption requirements.
 

MC-4 Multi-Modular Cleaner: UV Light, Plasma and Heating for SEM and TEM Samples.

mc4
 
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MC-4 Multi-Modular Cleaner: UV Light, Plasma and Heating for SEM and TEM Samples.  

Rave Scientific offers the MC-4 Multi-Purpose Cleaner, the first of its kind to combine UV light, plasma and vacuum treatment heating all in one system.

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