Discover the new LaserFIB for the ZEISS Crossbeam, your femtosecond laser for ultrafast material processing of large samples. Fabricate samples on the scale from 10 µm to 1 mm or more. Cut deep cross-sections through hard material such as SiC and expose structures of interest directly. When performing laser milling you will easily avoid contamination of your FIB-SEM as the laser is attached to a dedicated chamber which is separated from the main instrument chamber. With the new LaserFIB for ZEISS Crossbeam, you benefit from:

• Massive material removal: prepare extremely large cross-sections, up to millimeters in width and depth, within a few minutes (up to 15 mio. µm³/s)
• Combining laser and FIB: Gain rapid access to deeply buried structures for focused ion beam scanning electron microscope (FIB-SEM) analysis.
• Minimal damage: Thanks to ultrashort laser pulses (femtosecond laser) in a dedicated chamber, damage and heat affected zones remain minimal – without any instrument contamination.
• Fast and Intuitive TEM Sample Preparation Workflow
• Fast Removal of Material with the ZEISS Ion Sculptor FIB-Column
• Navigation and Accommodation of an 8 inch Wafer
• State of the Art High Resolution End Point Detection with ZEISS Live Imaging
• Best in Class 3D Reconstruction and Analytics
• Ease of Use by Design with the ZEISS GEMINI Electron Column

Highlights

Maximize Your SEM Insights

Take advantage of achieving up to 30% better SEM resolution at low voltage.

SEM Performance

• Count on the SEM performance of your ZEISS Crossbeam for 2D surface sensitive images or when performing 3D tomography
• Benefit from high resolution, contrast and signal-to-noise ratios, even when using very low accelerating voltages
• Characterize your sample comprehensively with a range of detectors. Get pure materials contrast with the unique Inlens EsB detector
• Investigate non-conductive specimens undisturbed by charging artifacts.

Increase Your FIB Sample Throughput

Profit from up to 40% faster material removal by the introduction of intelligent FIB milling strategies.

Ion-sculptor FIB

• Use the gallium FIB column Ion-sculptor for a new way of FIB-processing
• Get high quality samples, minimize FIB-induced damage and perform experiments faster at the same time
• Manipulate your samples precisely and fast by using up to 100 nA current without compromising FIB resolution
• Profit from speed and precision of intelligent FIB scanning strategies for material removal and perform your experiments up to 40% faster than before

Experience Best 3D Resolution in Your FIB-SEM Analysis

Enjoy the benefits of integrated 3D analysis for EDS and EBSD investigations.

Expand your Crossbeam

• Expand the capacity of your Crossbeam with ZEISS Atlas 5, the market-leading package for fast, precise tomography
• Perform EDS and EBSD analysis during tomography runs with the integrated 3D Analytics module of ZEISS Atlas 5
• Profit from best 3D resolution and leading isotropic voxel size in FIB-SEM tomography. Probe less than 3 nm in depth and produce surface sensitive, material contrast images using the Inlens EsB detector
• Save time by collecting your serial section images while milling. Take advantage of trackable voxel sizes and automated routines for active control of image quality