FS Laser Crossbeam Integrated System ZEISS
ZEISS CROSSBEAM Fs Laser Workstation 

Discover the new LaserFIB for the ZEISS Crossbeam, your femtosecond laser for ultrafast material processing of large samples. Fabricate samples on the scale from 10 µm to 1 mm or more. Cut deep cross-sections through hard material such as SiC and expose structures of interest directly. When performing laser milling you will easily avoid contamination of your FIB-SEM as the laser is attached to a dedicated chamber which is separated from the main instrument chamber. With the new LaserFIB for ZEISS Crossbeam, you benefit from:

  • Massive material removal: prepare extremely large cross-sections, up to millimeters in width and depth, within a few minutes (up to 15 mio. µm³/s)
  • Combining laser and FIB: Gain rapid access to deeply buried structures for focused ion beam scanning electron microscope (FIB-SEM) analysis.
  • Minimal damage: Thanks to ultrashort laser pulses (femtosecond laser) in a dedicated chamber, damage and heat affected zones remain minimal – without any instrument contamination.
  • Fast and Intuitive TEM Sample Preparation Workflow
  • Fast Removal of Material with the ZEISS Ion Sculptor FIB-Column
  • Navigation and Accommodation of an 8 inch Wafer
  • State of the Art High Resolution End Point Detection with ZEISS Live Imaging
  • Best in Class 3D Reconstruction and Analytics
  • Ease of Use by Design with the ZEISS GEMINI Electron Column



Maximize Your SEM Insights

Take advantage of achieving up to 30% better SEM resolution at low voltage.

SEM Performance

  • Count on the SEM performance of your ZEISS Crossbeam for 2D surface sensitive images or when performing 3D tomography
  • Benefit from high resolution, contrast and signal-to-noise ratios, even when using very low accelerating voltages
  • Characterize your sample comprehensively with a range of detectors. Get pure materials contrast with the unique Inlens EsB detector
  • Investigate non-conductive specimens undisturbed by charging artifacts.
Crossbeam Family

Increase Your FIB Sample Throughput

Profit from up to 40% faster material removal by the introduction of intelligent FIB milling strategies.

Ion-sculptor FIB

  • Use the gallium FIB column Ion-sculptor for a new way of FIB-processing
  • Get high quality samples, minimize FIB-induced damage and perform experiments faster at the same time
  • Manipulate your samples precisely and fast by using up to 100 nA current without compromising FIB resolution
  • Profit from speed and precision of intelligent FIB scanning strategies for material removal and perform your experiments up to 40% faster than before
Crossbeam Family

Experience Best 3D Resolution in Your FIB-SEM Analysis

Enjoy the benefits of integrated 3D analysis for EDS and EBSD investigations.

Expand your Crossbeam

  • Expand the capacity of your Crossbeam with ZEISS Atlas 5, the market-leading package for fast, precise tomography
  • Perform EDS and EBSD analysis during tomography runs with the integrated 3D Analytics module of ZEISS Atlas 5
  • Profit from best 3D resolution and leading isotropic voxel size in FIB-SEM tomography. Probe less than 3 nm in depth and produce surface sensitive, material contrast images using the Inlens EsB detector
  • Save time by collecting your serial section images while milling. Take advantage of trackable voxel sizes and automated routines for active control of image quality