Rave Scientific
Nanotechnology Instrument Providers and Consultants
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- Magnification Cal. MCS-1
EM-Tec MCS Series Magnification Calibration Standards
Overview
Rave Scientific offers EM-Tec MCS series magnification calibration standards which are unique and cost effective.Our calibration standards can be used for magnification calibration or critical dimension measurements in all electron and light microscope systems.
Two types of calibration ranges for the EM-Tec MCS calibration standards are offered, both standard with certificates of traceability or optionally with an individual certificate of calibration:
- EM-Tec MCS-1 with a scale ranging from 2.5mm to 1µm; ideal for table top and compact SEMs, covers 10x to 20,000x magnifications.
We offer a traceable and a certified version - EM-Tec MCS-0.1 with a scale ranging from 2.5mm down to 100nm; ideal for SEM, FESEM and FIB systems, covers 10x to 200,000 magnifications.We offer a traceable and a certified version
The features on the EM-Tec MCS series calibration standard are made using state of the art MEMS manufacturing techniques with high contrast chromium deposited lines for the larger features and gold over chromium for the smaller features below 2.5µm The gold deposited ensure optimum signal to noise ratio for calibration purposes. Advantages of the EM-Tec MCS series are:
- Unprecedented precision over the full calibration range
- All features in one single ultra-flat plane
- Metal on silicon with excellent signal to noise ratio
- Wider range of features to accurately calibrate low, medium and high magnification ranges
- Compatible with both SE and BSE imaging
- Fully conductive materials
- Easy to convert feature sizes
- Can be cleaned with plasma cleaning
- All NIST traceable or optionally certified
The EM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features) with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5x10µm) and 0.5µm (500nm).
Specifications for the EM-Tec MCS series calibration standards
| Substrate | 525µm thick boron doped ultra-flat wafer with orientation |
| Conductive | Excellent; 5-10 Ohm resistivity |
| Pattern size | 2.5 x 2.5mm |
| Chip size | 3.5 x 3.5mm (unmounted) |
| Features MCS-1 | 2.5, 1.0, and 0.5mm 250, 100, 10, 5, 2.5 and 1µm |
| Features MCS-0.1 | with additional 500, 250 and 100nm |
| Features material | 50nm Chromium for feature sizes 2.5mm to 2.5µm 50nm Gold over 20nm Chromium for size 1µm to 100nm |
| Traceable uniformity | 0.2% or better |
| Certified uniformity | 0.03% |
| Traceable uncertainty | 0.7% or better |
| Certified uncertainty | 0.09% |
| Traceability | Wafer level NIST traceability; average date measured on each production wafer |
| Certified | Optional; each certified EM-Tec MCS standard is individually calibrated against a NIST measured standard |
| Application | SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy |
| Identification | Product ID with serial number etched |
| Mounting | Unmounted, mounting optionally available |
| Supplied | Supplied in a Gel-Pak box |
EM-Tec MCS-1TR traceable magnification calibration standard, 2.5mm to 1µm.
The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are: 2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm. The 31-T31000 EM-Tec MCS-1TR is traceable on the wafer level against a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs. Example of wafer level certificate of traceability for the EM-Tec MCS-1TR magnification calibration standard, 2.5mm to 1µm.
EM-Tec MCS-1CF certified magnification calibration standard, 2.5mm to 1µm
The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are: 2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm. The 31-C31000 EM-Tec MCS-1CF is individually certified utilizing a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs. Example of individual certificate of calibration for the EM-Tec MCS-1CF certified magnification calibration standard, 2.5mm to 1µm.
EM-Tec MCS-0.1TR traceable magnification calibration standard, 2.5mm to 100nm
The EM-Tec MCS-0.1 calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The 31-T32000 EM-Tec MCS-0.1TR is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard. Attached example of a wafer level certificate of traceability for the EM-Tec MCS-0.1TR magnification calibration standard, 2.5mm to 100nm.
EM-Tec MCS-0.1CF certified magnification calibration standard, 2.5mm to 100nm
The EM-Tec MCS-0.1 calibration standard has been developed to most accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Brigth chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are: 2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The 31-C32000 EM-Tec MCS-0.1CF is individually NIST certified utilizing a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes. Example of individual certificate of calibration for the EM-Tec MCS-0.1CF certified magnification calibration standard, 2.5mm to 100nm