Micro-Tec Individual Graticule Calibration Standards

 

 

rs mn 31 T33200 CCS 5

Overview

Rave Scientific offers the new and innovative Micro-Tec individual graticule calibration standards which have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Cr lines. They are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec graticule calibration standards provide high contrast images for ease of calibration. Each of the calibration standards has a unique product ID and serial number etched on the die. Each of the Micro-Tec graticule calibration standard is fully NIST traceable and are supplied with a certificate of traceability.  The Micro-Tec graticule calibration standards are ideally suited for:

  • Reflective light microscopes
  • Stereo microscopes
  • Optical magnifiers
  • Low magnification SEM
  • Digital imaging systems
  • Quality control measurements

The Micro-Tec family of silicon based graticules for bright-field applications consists of:

  • CCS-1       1mm cross scale pattern with 0.01mm divisions
  • CCS-5       5mm cross scale pattern with 0.01mm divisions
  • CCS-10    10mm cross scale pattern with 0.01mm divisions
  • LCS-10     10mm compound linear scale with 1.0, 0.1 and 0.01mm divisions
  • CCS-2.5   1 inch cross scale pattern with 0.001inch divisions

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The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.

General specifications for  all Micro-Tec graticule standards:

Substrate  525µm thick boron doped ultra-flat wafer with orientation
Conductive Excellent, 5-10 Ohm resistivity
Lines

75nm thick, 5.0µm wide pure Chromium lines

Identification Product ID with serial number etched 
Mounting Unmounted standard
Supplied Supplied in a Gel-Pak box


Specifications for the individual Micro-Tec graticule calibration standards

Product #

Name

Pattern size

Units / Div

Die size

Traceable

Mounting

RS-MN-31-T33100-U

Micro-Tec CCS-1

1mm cross

0.01mm

3.5x3.5mm

Yes, NIST

Optional 

RS-MN-31-T33200-U

Micro-Tec CCS-5

5mm cross

0.01mm

6.0x6.0mm

Yes, NIST

 

RS-MN-31-T33300-U

Micro-Tec CCS-10

10mm cross

0.01mm

12.0x12.0mm

Yes, NIST

 

RS-MN-31-T33400-U

Micro-Tec LCS-10

10mm long

1.0/0.1/0.01mm

6.0x12.0mm

Yes, NIST

 

RS-MN-31-T33500-U

Micro-Tec CCS-2.5

1 inch cross

0.001inch

3.5x3.5mm

Yes, NIST

 

 

An alternative calibration standard is the MTC-5 multiple target calibration standards with cross scale pattern, circles, squares and hexagons. Covers both magnification calibration and images distortion assessments. Available for both bright field and dark field applications.

CCS-1 Micro-Tec 1mm cross scale, 0.01mm div., Si/Cr, opaque

rs mn 31 t33100 uThe Micro-Tec CCS-1 is a 1mm cross scale with 0.01mm divisions. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Die size is 3.5 x 3.5mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications.

CCS-5 Micro-Tec 5mm cross scale, 0.01mm div., Si/Cr, opaque

rs mn 31 t33200 11The Micro-Tec CCS-1 is a 1mm cross scale with 0.01mm divisions. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Die size is 3.5 x 3.5mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications.

CCS-10 Micro-Tec 10mm cross scale, 0.01mm div., Si/Cr, opaque

rs mn 31 t33300 uThe Micro-Tec CCS-10 is a 10mm cross scale with 0.01mm divisions. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Die size is 12x12mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications.

CCS-2.5 Micro-Tec 1inch cross scale, 0.001inch div., Si/Cr, opaque, unmounted

rs mn 31 t33500 uThe Micro-Tec CCS-2.5 is a 1 inch cross scale with 0.001 inch divisions. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Useful for calibration application for US or inch based products. Die size is 3.5x3.5mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications.

LCS-10 Micro-Tec 10mm linear compound scale, 1, 0.1, 0.01mm div., Si/Cr, opaque

31 T33400 LCS 10 10mm linear compound scale small The Micro-Tec LCS-10 is a 10mm compound linear scale with 1.0, 0.1 and 0.01mm divisions. 0 to 9mm show divisons of 0.1mm, 9 to 10mm includes additional divisions of 0.01mm. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Die size is 6x12mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications.

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