Overview 

Rave Scientific offers high purity sputter targets which are compatible with a wide variety of desk top sputter coaters. The sputter coaters are used to sputter a very thin layer of conductive metal on a non-conductive sample in order to investigate these samples with a scanning electron microscope (SEM). Our sputter targets are compatible with the following sputter coaters,  ion beam coaters or cryo-SEM preparation systems brands

                        199912 001a Jumping Spider
Jumping Spider (Salticidae) gold/palladium coated. Courtesy of David Scharf, www.scharfphoto.com
  • Agar, Anatech/Technics
  • Bal-Tec, Bio-Rad
  • Cressington
  • Denton
  • Edwards, Emitech,
  • Gatan
  • Hummer
  • ISI
  • JEOL
  • Leica
  • Polaron
  • Quorum
  • Safematic, SPI
  • Thermo
  • VG Microtech

Targets are relatively expensive due to the high purity of the precious metals which require multiple refining steps. A purity of 99.99% or close is desired to avoid any artifacts either in imaging or with EDX analysis. The target material you are in your sputter coater may not be best choice. Keep in mind there is a wide variety of targets and alternatives for many applications. Depending on your application, there is a choice of coating materials, see:

Practical Information Selecting Target Material to Coat SEM Samples.

Our sputter targets are made using high purity metal foils and are available in 60, 57, 54, 50 and 19mm diameter. Disc type sputter targets are widely used is all brands of sputter coaters. The most modern sputter coaters use a clamping ring to hold the target. Some older systems use a target support plate where the target needs to be bonded with the target plate by using silver paint or Indium. Use the EM-Tec Disc Sputter Target Selection Table to determine the target size for your coater (alternatively measure the target in your sputter coater) or go directly to ordering information for the target size:


- Ø19mm disc type high purity sputter targets for Gatan ion beam sputter coaters                                                                               - Ø60mm disc type high purity sputter targets for sputter coaters
- Ø57mm disc type high purity sputter targets for sputter coaters
- Ø54mm disc type high purity sputter targets for sputter coaters
- Ø50mm disc type high purity sputter targets for sputter coaters                                          

 sputter table

19mm Gatan Sputter Targets

sputter targers smallØ19mm disc type sputter targets for ion beam sputter coaters: Gatan Models 681 / 682 PECS and 685 PECS II.

Product Part Number Price
Silver Target, Ø19 x 1.5mm Disc, 99.99% Ag RS-RSI-70-AG1960 $365.00 each
Aluminum Target, Ø19 x 1.5mm Disc, 99.999% Al RS-RSI-70-AL1960 $253.33 each
Gold/Palladium Target, Ø19 x 1.5mm Disc, Au/Pd 60/40, 99.99% Au/Pd RS-RSI-70-AP1960 $995.00 each
Gold Target, Ø19 x 1.5mm Disc, 99.99% Au RS-RSI-70-AU1960 $1,025.00 each
Carbon (Graphite) Target, Ø19 x 1.5mm Disc, 99.99% C RS-RSI-70-CC1960 $198.00 each
Chromium Target, Ø19 x 1.5mm Disc, 99.95% Cr RS-RSI-70-CR1960 $255.00 each
Copper Target, Ø19 x 1.5mm Disc, 99.99% Cu RS-RSI-70-CU1960 $190.00 each
Iridium Target, Ø19 x 1.5mm Disc, 99.99% Ir RS-RSI-70-IR1960 $1,425.00 each
Niobium Target, Ø19 x 1.5mm Disc, 99.95% Nb RS-RSI-70-NB1960 $325.00 each
Nickel Target, Ø19 x 1.5mm Disc, 99.98% Ni RS-RSI-70-NI1960 $255.00 each
Palladium Target, Ø19 x 1.5mm Disc, 99.99% Pd RS-RSI-70-PD1960 $645.00 each
Platinum/Palladium Target, Ø19 x 1.5mm Disc, Pt/Pd 80/20, 99.99% Pt/Pd RS-RSI-70-PP1960 $1,025.00 each
Platinum Target, Ø19 x 1.5mm Disc, 99.99% Pt RS-RSI-70-PT1960 $1,085.00 each
Tantalum Target, Ø19 x 1.5mm Disc, 99.95% Ta RS-RSI-70-TA1960 $325.00 each
Tungsten Target, Ø19 x 1.5mm Disc, 99.95% W RS-RSI-70-WO1960 $325.00 each

50mm Sputter Targets

sputter targers smallØ50mm disc type sputter targets for sputter coaters: SEC MCM 100 & 200, Anatech/Technics Hummer I / II /III, Fullam EffaCoater / EMS-76, SPI Super.

Product Part Number Price
Silver Target, Ø50 x 0.25mm Disc, 99.97% Ag RS-RSI-70-AG5010 $188.00 each
Aluminum Target, Ø50 x 0.25mm Disc, 99.999% Al RS-RSI-70-AL5010 $150.00 each
Gold/Palladium Target, Ø50 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5004 $505.00 each
Gold/Palladium Target, 50 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5005 $525.00 each
Gold/Palladium Target, 50 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5008 $905.00 each
Gold/Palladium Target, 50 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5009 $915.00 each
Gold Target, 50 x 0.1mm Disc, 99.99% Au RS-RSI-70-AU5004 $595.00 each
Gold Target, 50 x 0.2mm Disc, 99.99% Au RS-RSI-70-AU5008 $935.00 each
Copper Target, 50 x 0.25mm Disc, 99.99% Cu RS-RSI-70-CU5010 $150.00 each
Nickel Target, 50 x 0.075mm Disc, 99.98% Ni RS-RSI-70-NI5003 $175.00 each
Palladium Target, 50 x 0.1mm Disc, 99.99% Pd RS-RSI-70-PD5004 $425.00 each
Platinum/Palladium Target, Ø50 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5004 $600.00 each
Platinum/Palladium Target, 50 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5008 $985.00 each
Platinum Target, 50 x 0.1mm Disc, 99.99% Pt RS-RSI-70-PT5004 $615.00 each
Platinum Target, Ø50 x 0.2mm Disc, 99.99% Pt RS-RSI-70-PT5008 $1,025.00 each
Titanium Target, Ø50 x 0.25mm Disc, 99.6+% Ti RS-RSI-70-TI5010 $140.00 each

54mm Safematic/Leica/Baltec Targets

sputter targers smallØ54mm disc type sputter targets for sputter coaters : Safematic, Bal-Tec SCD SCD005 / 040 / 050 / 500 / MD10 / MED20, LEICA EM SCD 005 / 050 / 500 / MED20 / ACE200 / ACE600, Emitech K575XD / K675X / K675XD.

Product Part Number Price
Iridium Target, Ø54 x 0.3mm Disc, 99.99% Ir RS-RSI-70-IR5412 $2,090.00 each
Chromium Target, Ø54 x 0.5mm Disc, 99.95% Cr RS-RSI-70-CR5420 $495.00 each
Titanium Target, Ø54 x 0.25mm Disc, 99.6+% Ti RS-RSI-70-TI5410 $140.00 each
Platinum Target, Ø54 x 0.2mm Disc, 99.99% Pt RS-RSI-70-PT5408 $1,030.00 each
Platinum Target, Ø54 x 0.1mm Disc, 99.99% Pt RS-RSI-70-PT5404 $620.00 each
Platinum/Palladium Target, Ø54 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5408 $990.00 each
Platinum/Palladium Target, Ø54 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5404 $605.00 each
Palladium Target, Ø54 x 0.1mm Disc, 99.99% Pd RS-RSI-70-PD5404 $430.00 each
Nickel Target, Ø54 x 0.075mm Disc, 99.98% Ni RS-RSI-70-NI5403 $175.00 each
Silver Target, Ø54 x 0.25mm Disc, 99.97% Ag RS-RSI-70-AG5410 $190.00 each
Copper Target, Ø54 x 0.25mm Disc, 99.99% Cu RS-RSI-70-CU5410 $150.00 each
Gold Target, Ø54 x 0.2mm Disc, 99.99% Au RS-RSI-70-AU5408 $940.00 each
Gold Target, Ø54 x 0.1mm Disc, 99.99% Au RS-RSI-70-AU5404 $570.00 each
Gold/Palladium Target, Ø54 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5409 $925.00 each
Gold/Palladium Target, Ø54 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5408 $915.00 each
Gold/Palladium Target, Ø54 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5405 $535.00 each
Gold/Palladium Target, Ø54 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5404 $510.00 each
Aluminum Target, Ø54 x 0.25mm Disc, 99.999% Al RS-RSI-70-AL5410 $150.00 each
Aluminum Sputter Target 54mm x 1mm thick RS-SM-30089 $325.00 each
Tungsten Sputter Target 54mm x 1mm thick RS-SM-30090 $250.00 each

57mm Cressington/Quorum/Agar/JEOL Targets

sputter targers smallØ57mm disc type sputter targets for sputter coaters: Agar Manual / Auto, Cressington 108 / 108SE / 208HR, Emitech K575X / CS7620, SC7610, ISI 5400, JEOL JFC 1200 / 1300 / 1400 / 1600 / 2300HR, Pelco SC4 / SC5 / SC6 /SC7, Polaron 5000 / 5200 / 5400 / 5800, Quorum Q150 / Q300 / SC7620 and SPI Module.

Product Part Number Price
Silver Target, Ø57 x 0.25mm Disc, 99.97% Ag RS-RSI-70-AG5710 $220.00 each
Aluminum Target, Ø57 x 0.25mm Disc, 99.999% Al RS-RSI-70-AL5710 $150.00 each
Gold/Palladium Target, Ø57 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5704 $575.00 each
Gold/Palladium Target, Ø57 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5705 $545.00 each
Gold/Palladium Target, Ø57 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5708 $1,050.00 each
Gold/Palladium Target, Ø57 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5709 $935.00 each
Gold Target, Ø57 x 0.1mm Disc, 99.99% Au RS-RSI-70-AU5704 $600.00 each
Gold Target, Ø57 x 0.2mm Disc, 99.99% Au RS-RSI-70-AU5708 $1,150.00 each
Chromium Target, Ø57 x 0.3mm Disc, 99.95% Cr RS-RSI-70-CR5712 $490.00 each
Chromium Target, Ø57 x 3.2mm Disc, 99.95% Cr RS-RSI-70-CR5799 $650.00 each
Copper Target, Ø57 x 0.25mm Disc, 99.99% Cu RS-RSI-70-CU5710 $195.00 each
Iridium Target, Ø57 x 0.3mm Disc, 99.99% Ir RS-RSI-70-IR5712 $2,250.00 each
ITO (Indium Tin Oxide) Target Ø57 x 3.0mm Disc, including 1mm thick copper backing plate, 90/10 Wt% In2O3/SnO2, 99.99% RS-RSI-70-IT7099 $1,050.00 each
Molydenum Target, Ø57 x 0.25mm Disc, 99.95% Mo RS-RSI-70-MO5710 $195.00 each
Niobium Target, Ø57 x 0.25mm Disc, 99.95% Nb RS-RSI-70-NB5710 $205.00 each
Nickel Target, Ø57 x 0.075mm, 99.98% Ni RS-RSI-70-NI5703 $175.00 each
Palladium Target, Ø57 x 0.1mm Disc, 99.99% Pd RS-RSI-70-PD5704 $435.00 each
Platinum/Palladium Target, Ø57 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5704 $610.00 each
Platinum/Palladium Target, Ø57 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5708 $995.00 each
Platinum Target, Ø57 x 0.1mm Disc, 99.99% Pt RS-RSI-70-PT5704 $625.00 each
Platinum Target, Ø57 x 0.2mm Disc, 99.99% Pt RS-RSI-70-PT5708 $1,035.00 each
Tantalum Target, Ø57 x 0.25mm Disc, 99.95% Ta RS-RSI-70-TA5710 $290.00 each
Titanium Target, Ø57 x 0.25mm Disc, 99.6+% Ti RS-RSI-70-TI5710 $140.00 each
Tungsten Target, Ø57 x 0.25mm Disc, 99.95% W RS-RSI-70-WO5710 $245.00 each
Platinum Target, Ø57 x 0.3mm Disc, 99.99% Pt RS-RSI-70-PT5710 $1,205.00 each

60mm Denton/Emitech Targets

sputter targers smallØ60mm disc type sputter targets for sputter coaters: Denton Desk II / III / IV /V, Edwards 150B / Scancoat, Emitech K500 / K550 / K650 and Emscope SC500.

Product Part Number Price
Silver Target, Ø60 x 0.25mm Disc, 99.97% Ag RS-RSI-70-AG6010 $195.00 each
Aluminum Target, Ø60 x 0.25mm Disc, 99.999% Al RS-RSI-70-AL6010 $150.00 each
Gold/Palladium Target, Ø60 x 0.1mm Disc, Au/Pd 60/40, 99.99% Au/Pd RS-RSI-70-AP6004 $555.00 each
Gold/Palladium Target, Ø60 x 0.1mm Disc, Au/Pd 80/20, 99.99% Au/Pd RS-RSI-70-AP6005 $585.00 each
Gold/Palladium Target, Ø60 x 0.2mm Disc, Au/Pd 60/40, 99.99% Au/Pd RS-RSI-70-AP6008 $955.00 each
Gold/Palladium Target, Ø60 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP6009 $985.00 each
Gold Target, Ø60 x 0.1mm Disc, 99.99% Au RS-RSI-70-AU6004 $595.00 each
Gold Target, Ø60 x 0.2mm Disc, 99.99% Au RS-RSI-70-AU6008 $995.00 each
Chromium Target, Ø60 x 0.3mm Disc, 99.95% Cr RS-RSI-70-CR6012 $575.00 each
Copper target, Ø60 x 0.25mm Disc, 99.99% Cu RS-RSI-70-CU6010 $150.00 each
Iridium Target, Ø60 x 0.3mm Disc, 99.99% Ir RS-RSI-70-IR6012 $2,245.00 each
Nickel Target, Ø60 x 0.075mm Disc, 99.98% Ni RS-RSI-70-NI6003 $180.00 each
Palladium Target, Ø60 x 0.1mm Disc, 99.99% Pd RS-RSI-70-PD6004 $445.00 each
Platinum/Palladium Target, Ø60 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP6004 $625.00 each
Platinum/Palladium Target, Ø60 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP6008 $1,045.00 each
Platinum Target, Ø60 x 0.1mm Disc, 99.99% Pt RS-RSI-70-PT6004 $645.00 each
Platinum Target, Ø60 x 0.2mm Disc, 99.99% Pt RS-RSI-70-PT6008 $1,065.00 each
Titanium Target, Ø60 x 0.25mm Disc, 99.6+% Ti RS-RSI-70-TI6010 $145.00 each

82mm Annular Targets

sputter targers smallØ82mm OD x Ø60mm ID annular type sputter targets for sputter coaters: Polaron / Biorad E5100 / SC510 / SC515 and Polaron / Quorum SC7640 / 7680.

3inch Annular Targets

sputter targers smallØ3 OD x Ø2 ID annular type sputter targets for sputter coaters: Anatech / Technics Hummer V / VI / 6.2 / 8.

Results 1 - 105 of 105