SEM Sputter Targets

• My Specimen Coater
  • Agar
  • Anatech/Technics
  • Bal-Tec
  • Bio-Rad
  • Cressington
  • Denton
  • Edwards
  • Emitech
  • Gatan
  • Hummer
  • JEOL
  • Leica
  • Polaron
  • Safematic
  • SPI

                                                                                                                  

                                                                      Proper Sputter Target Selection Guide 

 

Overview 

Rave Scientific offers high purity sputter targets which are compatible with a wide variety of desk top sputter coaters. The sputter coaters are used to sputter a very thin layer of conductive metal on a non-conductive sample in order to investigate these samples with a scanning electron microscope (SEM). Our sputter targets are compatible with the following sputter coaters,  ion beam coaters or cryo-SEM preparation systems brands

                       

• Agar, Anatech/Technics
• Bal-Tec, Bio-Rad
• Cressington
• Denton
• Edwards, Emitech,
• Gatan
• Hummer
• ISI
• JEOL
• Leica
• Polaron
• Quorum
• Safematic, SPI
• Thermo
• VG Microtech

Targets are relatively expensive due to the high purity of the precious metals which require multiple refining steps. A purity of 99.99% or close is desired to avoid any artifacts either in imaging or with EDX analysis. The target material you are in your sputter coater may not be best choice. Keep in mind there is a wide variety of targets and alternatives for many applications. Depending on your application, there is a choice of coating materials, see:

Practical Information Selecting Target Material to Coat SEM Samples.

Our sputter targets are made using high purity metal foils and are available in 60, 57, 54, 50 and 19mm diameter. Disc type sputter targets are widely used is all brands of sputter coaters. The most modern sputter coaters use a clamping ring to hold the target. Some older systems use a target support plate where the target needs to be bonded with the target plate by using silver paint or Indium. Use the below  Disc Sputter Target Selection Table to determine the target size for your coater (alternatively measure the target in your sputter coater) or go directly to ordering information for the target size:

- Ø19mm disc type high purity sputter targets for Gatan ion beam sputter coaters                                                                          - Ø50mm disc type high purity sputter targets for sputter coaters  
- Ø57mm disc type high purity sputter targets for sputter coaters
- Ø54mm disc type high purity sputter targets for sputter coaters                                                                                                    - Ø60mm disc type high purity sputter targets for sputter coaters                                                                                                   - -Ø60mm disc type high purity sputter targets  on target holder for EMITECH and EMS sputter coaters