The Safematic Sputter coating system is a paradigm shift in the area of ease of use and overall flexibility for lab environments. One single system can be configured for sputter and carbon deposition. The patented automated carbon threading system allows for unattended carbon depositions providing the most advanced and versatile system design on the market today. The system can be software controlled from any modern PC platform and addresses the following applications:
Safematic Unique Features
Whether an end user needs to sputter, vaporize, or apply plasma treatment to carbon – you can configure the Safematic system for each of these applications by simply changing the process head. The Safematic system comes in two versions: The CCU-010 LV for low vacuum applications and the CCU-010 HV for high-vacuum applications. The modular concept of this product provides an in the field upgrade path, making it easy to convert the LV unit to a HV unit. The plug-and-play concept allows you to start up the device by yourself. You only need to connect the power supply and process gas.
SP-010 Sputtering Module
An integral part of the Safematic CCU-010 system is the SP-010 sputtering module. The housing of the SP-010 holds the chosen target. This allows our coating system to have a small form factor and yet offer all the features required for high quality sputter coating in a vacuum environment. The module fully integrates a magnetron, target, shutter, process pressure regulator and power electronics in a unique, robust unit that is guaranteed to be ready for operation and easy to maintain. An innovative interface with power and gas supply as well as signal transmission allows the modular system to be configured to work as a sputtering unit with just a single hand movement.
Highlights of the SP-010 Sputtering Module
CT-010 Carbon Thread Module
As a small, compact module, the CT-010 carbon yarn head has all the technical characteristics required for reproducible vaporizations and subsequent surface modifications. A newly developed automatic carbon yarn tracking system enables the unit to generate up to 50 carbon films without the user having to adjust the carbon yarn vaporizer. A high-performance combination of carbon coating and subsequent glow discharge treatment without interrupting the vacuum conditions ensures exceptionally efficient generation of hydrophilic carbon-carrying films.
Safematic RS-010 Rotary Stage
Safematic PS-010 Planetary Stage
The above PS-010 planetary stage combined with the RS-010 rotary stage provides maximum flexibility. An integrated plug connection for the motor and layer thickness sensor is provided allowing the sample table to be exchanged in seconds. This stage delivers a universal, smooth adjustment of table height, tilt angle and rotational speed guaranteeing exceptionally homogenous films even on very jagged samples. Samples can be arranged optimally on the table thanks to the intelligent layout of the mounting holes for SEM stubs. The compact pancake design enables handy preparation and sample transport with a height of just 23 mm with an 80 mm diameter.