Overview of Sample Holders TEM Grids Stage Adapters Stub Adapters Sample Preparation
Overview
TEM Sample lift-out in a FIB-SEM workstation is a challenging application. Owning the right hardware is an essential contributor to a high success rate with respect to lift-out. The EM-Tec FIB grid holders are designed to hold FIB grids and provide easy access to the posts on the FIB grids, whereby making it easy for an end user to attach the milled FIB lift-out lamellae. FIB grid holders can not only be used in the FIB-SEM workstation, but also for safe storage of the FIB grids with attached lamellae.
The EM-Tec FIB grid and sample holders are compact holders which hold the FIB grids directly aside a standard SEM pin stub with a sample. The lift-out lamellas only need to be moved over a short distance to attach them to the FIB grids. The EM-Tec FIB grid holders are all precision machined from vacuum grade aluminum:
Available in the following types:
These holders can all be used on the FIB and FIB-SEM systems from FEI, Hitachi, Zeiss and TESCAN. For JEOL, FIB-SEM systems use a suitable EM-Tec stub adapter.
Part Number | Type | Capacity | Size w/o Pin | Grip Hold | SEM Stage Compatibiity |
---|---|---|---|---|---|
RS-MN-12-000270 | EM-Tec F12 | 2 FIB grids | Ø12.7 x 8mm | vise | Standard Ø3.2mm pin |
RS-MN-12-003270 | EM-Tec F12Z | 2 FIB grids | Ø12.7 x 8mm | vise | Short Zeiss Ø3.2mm pin |
RS-MN-12-000275 | EM-Tec F25 | 5 FiB grids | 29 x 22.5 x 14mm | vise | Standard Ø3.2mm pin |
RS-MN-12-000375 | EM-Tec F25 | 5 FiB grids | 29 x 22.5 x 14mm | vise | M4 thread |
RS-MN-12-000277 | EM-Tec FS21 | 2 FIB grids + samples | 14 x 40.5 x 20mm | vise | Standard Ø3.2mm pin |
RS-MN-12-000377 | EM-Tec FS21 | 2 FIB grids + samples | 14 x 40.5 x 20mm | vise | M4 thread |
RS-MN-12-000278 | EM-Tec FS22 | 2x2 FIB grids + samples | 27 x 27 x 20mm | vise | Standard Ø3.2mm pin |
RS-MN-12-000378 | EM-Tec FS22 | 2x2 FIB grids + samples | 27 x 27 x 20mm | vise | M4 thread |
RS-MN-12-000276 | EM-Tec FS25 | 5 FIB grids + sample | 50 x 29 x 14mm | vise | Standard Ø3.2mm pin |
RS-MN-12-000376 | EM-Tec FS25 | 5 FIB grids + sample | 50 x 29 x 14mm | vise | M4 thread |
Product #
Price
$133.32 each
EM-Tec F25 is a larger FIB grid holder with pin which can accommodate up to 4 FIB grids of the same thickness. The 25mm wide vise include a ledge for easy positioning of the FIB grids and two brass thumb screws to operate the vise.
Product #
Price
$266.65 each
The EM-Tec FS25 combines the wider F25 FIB grid holder vise with a holder for Ø25.4mm pin stubs in a single compact holder with a standard pin. This provides a single loading cycle for FIB grids and samples and short distances from form lift-out to lamellae mounting. Wafer type sample surface is at the same height as the FIB grid posts.
Product #
Price
$133.32 each
The EM-Tec FS21 combines the EM-Tec F12Z FIB grid holder with two standard 12.7mm (1/2inch) pin stubs. The F12 FIB grid holder and the sample stubs can be rotated in the holder for selecting the optimum orientation in the FIB/SEM system. The EM-Tec FS21 FIB grid and sample holder enables loading the samples and FIB grids close together. The FIB grid and the sample stubs are at the same level when using Si wafer samples. Includes 1x EM-Tec F12Z and 2x standard 12.7mm pin stubs.
Product #
Price
$159.99 each
The EM-Tec FS22 combines two F12 FIB grid holders with two standard 12.7mm (1/2inch) pin stubs within a 27x27mm footprint. Both the F12 FIB grid holders and the pin stubs can be rotated independently in the holder for selecting the optimum orientation in the FIB/SEM system. The EM-Tec FS22 dual FIB grid and sample holder enables loading the samples and FIB grids close together. The FIB grid and the sample stubs are at thesame level when using Si wafer samples. Includes 2x EM-Tec F12 and 2x standard 12.7mm pin stubs.
Product #
Price
$130.65 each
EM-Tec F25 is a larger FIB grid holder with a M4 threaded hole which can accommodate up to 4 FIB grids of the same thickness. The 25mm wide vise include a ledge for easy positioning of the FIB grids and two brass thumb screws to operate the vise.
Product #
Price
$263.99 each
The EM-Tec FS25 combines the the wider F25 FIB grid holder vise with a holder for Ø25.4mm pin stubs in a single compact holder with an M4 thread. This provides a single loading cycle for FIB grids and samples and short distances from form lift-out to lamellae mounting. Wafer type sample surface is at the same height as the FIB grid posts.
Product #
Price
$115.99 each
The F12 FIB grid holder and the sample stubs can be rotated in the holder for selecting the optimum orientation in the FIB/SEM system. The EM-Tec FS21 FIB grid and sample holder enables loading the samples and FIB grids close together. The FIB grid and the sample stubs are at the same level when using Si wafer samples. Includes 1x EM-Tec F12Z and 2x standard 12.7mm pin stubs.
Product #
Price
$155.99 each
EM-Tec FS22 combines two F12 FIB grid holders with two standard 12.7mm (1/2inch) pin stubs within a 27x27mm footprint. Both the F12 FIB grid holders and the pin stubs can be rotated independently in the holder for selecting the optimum orientation in the FIB/SEM system. The EM-Tec FS22 dual FIB grid and sample holder enables loading the samples and FIB grids close together. The FIB grid and the sample stubs are at the same level when using Si wafer samples. Includes 2x EM-Tec F12 and 2x standard 12.7mm pin stubs.
Product #
Price
$119.99 each
EM-Tec F18 is a high capacity FIB grid holding stub for holding up to 8 FIB grids with 4 individual small clamps. It is basically 4 x the EM-Tec F12 on a 25.4mm (1”) stub. Each of the 10mm wide vise clamps includes a ledge for easy positioning of the FIB grids. Ideal for safe storage of the FIB grids with lamellas or for high throughput FIB applications
Product #
Price
$39.99 each
EM-Tec F12Z is a basic yet practical FIB grid holder with pin for 2 FIB grids. Based on the standard Ø12.7mm pin stub with the short Zeiss pin, it is compact and useful for storing valuable FIB samples. The 10mm wide vise clamp includes a ledge for easy positioning of the FIB grids.
Product #
Price
$119.99 each
EM-Tec F12LP is the low profile version of the EM-Tec F12 grid holder for 2 FIB grids. The low height and small dimensions allow for high tilt operation at low working distance. The 12.5mm wide vise clamp includes a ledge for easy positioning of the FIB grids. Only 3mm total height above the pin.