Micro-Tec MTC-5 Multiple Target Graticule Calibration Standards

Overview Calibration Standards

rs mn 31 T33600

 

Overview

Rave Scientific offers the new and innovative Micro-Tec MTC-5 multiple target graticule calibration standards which have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. The precise patterns are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging,  optical quality control systems and low magnification SEM imaging for:

  • Magnification calibration
  • Critical dimension measurements
  • Distortion correction
  • Imaging quality assessment
  • Quality control measurements.

There are four distinct patterns on the MTC-5 calibration standard:

  • Circle patterns from 10µm to 5mm diameter
  • Square patterns from 10x10µm to 5x5mm
  • Hexagon patterns from 10µm to 5mm across
  • Cross scale pattern of 5x5mm with 0.01mm divisions

The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.Each of the calibration standards has a unique product ID serial number etched on the die. The Micro-Tec MTC-5 calibration standards are NIST traceable; a wafer level certificate of tracebility is supplied with each standard. The MTC-5 is available in two versions:

  • MTC-5 with Cr lines on silicon for bright field imaging
  • MTCD-5 with inverted pattern (area between line coated with Cr) for dark field imaging


Specifications for the Micro-Tec MTC-5 multiple target calibrating graticule standards:


Substrate 525µm thick boron doped ultra-flat wafer with orientation
Conductive Excellent; 5-10 Ohm resistivity
Patterns Circles, squares, hexagons, cross scale
Pattern size 5 x 5mm (4x)
Lines  75nm thick, pure bright Chromium lines
5µm wide lines spaced 10, 25, 50, 75, 100, 125 and 150µum apart
10µm wide lines, spaced 200, 250, 300, 350, 400, 500, 600, 700, 800 and 900µm apart
20µm wide lines spaced 1.0, 1.5, 2, 2.5, 3, 3.5, 4, 4.5 and 5mm apart
Cross scale
pattern
5mm wide lines, 5 x 5mm with 0.01mm divisions
Die size 12 x 12mm
Application Reflective light, scanning electron microscopy, optical imaging systems
Identification Product ID with serial number etched 
Mounting Unmounted, mounting optionally available
Supplied Supplied in a Gel-Pak box

Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, Bright Field

rs mn 31 t33600 uThe Micro-Tec MTC-5 bright field multiple target calibration standard comprises accurately deposited bright chromium lines on a conductive ultra-flat silicon substrate. The MTC-5 has been designed for calibrating reflective light microscopes, stereo microscopes, optical quality control systems and low magnification SEM imaging. The Micro-Tec MTC-5 incorporates four distinct patterns: Circle patterns from 10µm to 5mm diameter Square patterns from 10x10µm to 5x5mm Hexagon patterns from 10µm to 5mm across Cross scale patterns of 5x5mm with 0.01mm divisions The four chromium deposited patterns all in the same focus plane and provide a more superior signal compared to etched patterns. The Micro-Tec MTC-5 is a NIST traceable standard. Example of wafer level certificate of traceability for the Micro-Tec MTC-5 multiple target calibration standard.

Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, Dark Field

rs mn 31 t33700 uThe MTCD-5 dark field multiple target calibration standard comprised four inverted patterns; chromium deposited area with features left undeposited showing the silicon substrate. Designed for dark field applications in reflected light microscopy, optical quality control systems and low magnification SEM imaging. The large chromium coated are can also be used to assess the ability of optical systems to distinguish features in high brightness and high reflection applications. Patterns are: Inverted circle patterns from 10µm to 5mm diameter Inverted square patterns from 10x10µm to 5x5mm Inverted hexagon patterns from 10µm to 5mm across Inverted cross scale patterns of 5x5mm with 0.01mm divisions. The four chromium deposited patterns all in the same focus plane and provide more a superior signal compared to etched patterns. The Micro-Tec MTC-5 is a NIST traceable standard. Example of wafer level certificate of traceability for the Micro-Tec MTC-5 multiple target calibration standard.

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