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Edwards iGX Dry Pumps
Overview
The Edwards iGX Dry Pumps provide a versatile vacuum pump platform with reliable performance for clean to medium-duty silicon and compound semiconductor applications. Compact size and low vibration allow great flexibility as iGX pumps can be used for on-tool, proximity or remote installations - in turn, ensuring space savings and ultimately reduced overall cost of ownership. The iGX pumps also offer Ethernet connectivity and other networking options. The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Product #
Price
$21,138.92 each
The Edwards iGX 100L 200.230 volt dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Technical Data
| Peak speed | 105 m3h-1 |
| 62 cfm | |
| 1750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 0 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
Product #
Price
$21,138.92 each
The Edwards iGX 100L 380 to 460 volt dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote
Technical Data
| Peak speed | 105 m3h-1 |
| 62 cfm | |
| 1750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 0 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
Product #
Price
$24,348.92 each
The Edwards iGX 100N 200 to 230 volt dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote
Technical Data
| Peak speed | 105 m3h-1 |
| 62 cfm | |
| 1750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 0 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
Product #
Price
$24,348.92 each
The Edwards iGX 100N 380 to 460 volt dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Technical Data
| Peak speed | 105 m3h-1 |
| 62 cfm | |
| 1750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 0 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
* Requires constant flow valve accessory.
Product #
Price
$24,990.92 each
The Edwards iGX 100M 200 to 230 volt dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote
Technical Data
| Peak speed | 105 m3h-1 |
| 62 cfm | |
| 1750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 0 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
* Requires constant flow valve accessory.
Product #
Price
$24,990.92 each
The Edwards iGX 100M 200 to 230 volt dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or
Technical Data
| Peak speed | 105 m3h-1 |
| 62 cfm | |
| 1750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 0 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
* Requires constant flow valve accessory.
