Edwards iGX100M 380-460 volts RS-EV-A54612959

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$24,990.92 each Out of stock Weight: 50 lb


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The Edwards iGX 100M 200 to 230 volt dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or

Technical Data


Peak speed 105 m3h-1
  62 cfm
  1750 l min-1
Ultimate pressure 5.00E-03 mbar
  3.75E-03 Torr
  0.50 Pa
Power at 700 Torr exhaust  
Ultimate 1 kW
AUC (Active Utility Controller) 0.05 kW
Water inlet* 1 slm
Nitrogen 0 slm
Footprint excluding exhaust 0.20 m2
Weight 120 kg
Inlet connection ISO63
Outlet connection NW25
Noise at ultimate < 55 dB(A)

 
* Requires constant flow valve accessory.

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