Ibss T12 Large Chamber High Vacuum Multi-Purpose TEM Holder and Sample Plasma Cleaner

Overview

Ibss T12 is a large chamber turnkey innovative high vacuum TEM holder and plasma processing workstation. The T12 workflow supports all aspects of preparation for cleaning large samples up to an 8-inch wafer, preparing TEM experiments, while providing vacuum storage for up to nine TEM holders.

The ibss T12 features:

• Inductively coupled plasma cleaning of samples-Bringing no heat to the sample.
• Multiple independent storage of TEM holders, isolated from plasma processing.
• Hydrophobic to hydrophilic surface plasma treatment
• Plasma cleaning of TEM holders pre and post sample preparation
• Leak checking, gas/liquid E-Chip viewing while mounting
• Mobility, with a plasma source that is adaptable to any SEM chamber

The T12 design features are as follows:

• Turbo Molecular Pumped System-Oil Free Backing Pump
• 12 Inch size chamber to accommodate an 8-inch wafer.
• Stores up to 9 TEM holders under high vacuum
• Pressure monitoring for possible gas/liquid cell leaks at <2e-5 Torr
• 3 position toggle-switch: (vent, on, off)
• Easy touchscreen operation
• Qwik switch flanges for multi-purpose adaptation between the chamber and multiple SEMs in minutes.
• Use reductive gas mixtures for polymer/organic samples
• On board plasma driving gas cylinder

Ibss T12 Large Chamber High Vacuum Multi-Purpose TEM Holder and Sample Plasma Cleaner

 

Product # Unit Name

Ibss T12 Large Chamber High Vacuum Multi-Purpose TEM Holder and Sample Plasma Cleaner

Request Quote / Info