Ibss GV10X P6-UHV In Situ Plasma Cleaner

Overview

The GV10x UHV DS Asher is designed to reside on a UHV chamber after chamber plasma cleaning in millitorr range without breaking vacuum. This one of a kind in-situ plasma source eliminates the need for a costly isolation valve and pre-pump.

Key Features:

• Cleaning Cycle in Minutes; 10X Faster than Competitive Units
• Offers Superior Performance over ‘Classical’ Capacitive Antenna Source
• O2/Ar O0 Plasma for Non-Oxidizing Surfaces
• H2/Ar/Ne H0 Plasma for Ni and Rh oxidizing layers
• Grating Efficiency Increased by factor of 7.6
• Full Recovery of Blazed High Energy Grating Profile
• Continuously Adjustable

Ibss GV10X P6-UHV In Situ Plasma Cleaner

 

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Ibss GV10X P6-UHV In Situ Plasma Cleaner

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The GV10x UHV DS Asher is designed to reside on a UHV chamber after chamber plasma cleaning in millitorr range without breaking vacuum. This one of a kind in-situ plasma source eliminates the need for a costly isolation valve and pre-pump.

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