Tungsten SEM Filaments

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Tungsten Filaments

Overview

Rave Scientific offers SEM tungsten filaments for all major brands of scanning and transmission electron microscopes. These high quality, high stability tungsten EM filaments, also called cathodes or electron emitters, are manufactured to exceed the specifications of the original equipment manufacturers. These superior cathodes are made using high quality ceramic discs, exact size contact pins and high grade tungsten filament wire. Special tools are used to produce the correct shape of the tungsten filament. All EBS tungsten filaments are precisely aligned and annealed in high vacuum to reduce stress in the filament. This will guarantee optimum stability, maximum brightness, longer lifetime and overall lower running costs.

Exclusive features of the EBS tungsten EM filaments are:

  • Minimum tip radius for coherent beam
  • Rigid attachment of filament wire to post to increase stability
  • Fully stress relieved for enhanced cathode lifetime
 

Tungsten Filament Selection Table

My µ Scope       Product number Ceramic Disc mm Pin Diameter  mm Pin Pitch mm
AmRay /AMR (except 1200 series)

RS-EBS-AR-AMRE-N-10

26.0

1.0

5.0

Cambridge Instruments (except S4-10)

RS-EBS-VS-AE-N-10

12.0 1.0 6.45
CamScan with AEI conversion

RS-EBS-VS-AE-N-10

12.0 1.0 6.45
CamScan with new Tescan Column

RS-EBS-VL-TE-N-10

19.8 1.0 5.0
SEC

RS-EBS-CL-ISIE/2-N-10

23.4 1.2 12.0
FEI

RS-EBS-VL-PE-N-10

26.0 1.0 5.0
Hitachi S-Type

RS-EBS-VL-HO-N-10

9.8 1.2 2.7
Hitachi  with Cartridge TM series tabletop
3400N, 3700N, SU1500, SU3500

RS-EBS-VL-HOC-N-10

9.8 1.2 2.7
ISI /ABT / Topcon 2-Pin

RS-EBS-CL-ISIE/2-N-10

23.4 1.2 12.0
JEOL K-Type with metal ring

RS-EBS-CL-JE-N-6

28.0 1.2 8.0
Leica

RS-EBS-VS-AE-N-10

12.0 1.0 6.45
LEO 400 and 1400 Series SEM

RS-EBS-VS-AE-N-10

12.0 1.0 6.45
LEO1450 (except AEI conversions)

RS-EBS-VL-ZE-N-10

19.8 1.0 5.0
LEO TEM

RS-EBS-VL-ZE-N-10

19.8 1.0 5.0
Coxem

RS-EBS-CL-ISIE/2-N-10

23.4 1.2 12.0
Philips V-Loop (PSEM500/EM200 and later)

RS-EBS-VL-PE-N-10

26.0 1.0 5.0
Tescan

RS-EBS-VL-TE-N-10

19.8 1.0 5.0
ZEISS DSM and TEM

RS-EBS-VL-ZE-N-10

19.8 1.0 5.0
ZEISS EVO

RS-EBS-VS-AE-N-10

12.0 1.0 6.45

Product Part Number Price
Filaments for all ZEISS EVO, Cambridge-Leica and LEO Scanning Electron Microscopes. RS-EBS-VS-AE-N-10 $205.00 each
Filaments for JEOL K-Type Base Tungsten Filaments with Metal Ring RS-EBS-CL-JE-N-6 $370.00 each
Filaments for Hitachi S-Type Base SEMs RS-EBS-VL-HO-N-10 $520.00 each
Filaments for Tescan Scanning Electron Microscopes RS-EBS-VL-TE-N-10 $550.00 each
Filaments for SEC, COXEM and Pemtron Scanning Electron Microscopes RS-EBS-CL-ISIE-2-N-10 $455.00 each
Filaments for FEI-Philips Base Scanning Electron Microscopes RS-EBS-VL-PE-N-10 $360.00 each

Denka LaB6 Filaments

                                                                                                                                                                                   Return to Filaments Overview  
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Denka Lab6 Filaments

Overview

Rave Scientific offers Denka Lab6 cathode. The Denka M-3 LaB6 filaments are the industry standard, high quality LaB6 cathodes. The standard cathode with the 15µm round tip has a 90° tip angle, which provides a high brightness source coupled with excellent stability. Special versions with sharper 60° tip angle and smaller 5µm/10µm round tips are available for TEMs.

Denka uses the purest, high quality LaB6 crystals for the Denka LaB6 cathodes. The Denka LaB6 tip provides a 10x higher brightness as the standard tungsten source, resulting in better resolution with clear images and less noise. The lifetime of the LaB6 cathode is much longer than a tungsten source providing a stable source over a longer period. The LaB6 sources require a higher vacuum than standard tungsten sources which generally requires an additional ion-getter pump at the electron source. The required vacuum is in the 10-7 torr range.

Here are some listed advantages for Lab6:

  • Longer Extended Life > 750 hours
  • Improved performance for low KV imaging
  • Advantages for TEM imaging and analysis
  • Electron probe micro analyzers (EPMA or Microprobe)
  • Improved stability for E-beam lithography
  • Improved imaging in Variable and Low pressure SEM conditions.

Design and features of the Denka M-3 LaB6 EM cathodes

The Denka LaB6 EM cathode construction is similar to that of tungsten cathodes. It uses the same base with tungsten wires attached to the contact pins. Instead of a full tungsten loop, the LaB6 crystal forms the tip with the tungsten wires are cemented against the LaB6 crystal. In this design the LaB6 crystal is directly heated by the filament current through the tungsten wires and the LaB6 crystal. This unique construction has a number of features and benefits:

  • Interchangeability: Denka M-3 LaB6 cathodes are designed as direct replacement for tungsten filaments and in most cases if there is an ion pump for high vacuum then an end user can use a Lab6 or Tungsten filament.
  • The Denka Lab6 is suitable for SEM and TEM
  • Direct heating design with tungsten wired cemented at the high purity LaB6 crystal
  • High brightness; about 10x higher than tungsten filaments (even 20x for sharper tips)
  • Stable sources; due to its durable and simple construction, the standard Denka M3 LaB6 comprises a stability of better than 3%/hour at 1550°C
  • Long life; at 10-7 torr vacuum and 1550°C operating temperature, 500-2000 hours of lifetime can be expected for the standard M3 LaB6 cathode
  • Low vapor pressure; reduced evaporation loss
  • High melting point and stability at operating temperatures
  • Low work function of 2.66ev (compared to 4.7ev for tungsten)
Specifications of the Denka M-3 LaB6 EM cathodes

Please consult the following table for the correct type of LaB6 source for your SEM, TEM or Microprobe. The Denka LaB6 EM cathodes are available for FEI, Hitachi, JEOL, Amray, CamScan, Philips, Tescan, ZEISS, LEO, Leica, Cambridge Instruments and Leica electron microscopes.

Lab6 Emitter Standard Tip Sharp Tip
Tip shape 90°cone angle with 15µm round tip 60°cone angle with 5µm round tip 60°cone angle with 10µm round tip
Brightness Value 10x times than tungsten tip. 1 x 106 A/cm2.Str 2x times than standard tip 2 x 106 A/cm2.Str
Saturation Mono spot at around 1500°C Mono spot at around 1500°C
Crossover Small; 7-10µm Small; 7-10µm
Angular Distribution Sharp; 1.6 x 10-2 rad Sharp; 1.6 x 10-2 rad
Lifetime Approx. 500 - 2000 hrs Shorter than standard tip
Ease of operation Moderate Difficult due to spot adjustment
Stability High, better than 3%/hr Lower, due to smaller spot
Vacuum Requirements 10-7 torr or better 10-7 torr or better
Work function 2.66 ev 2.66 ev
Denka M-3 LaB6 EM cathode selection table

Electron Microscope Type or Filament base

Product number

Ceramic Disc mm

Pin Diameter  mm

Pin Pitch mm

AEI

RS-EBS-M3-CA

12.0

1.0

6.45

AmRay /AMR (except 1200 series)

RS-EBS-M3-KF2

26.0

1.0

5.0

Cambridge Instruments (except S4-10)

RS-EBS-M3-CA

12.0

1.0

6.45

CamScan with AEI conversion

RS-EBS-M3-CA

12.0

1.0

6.45

FEI TEM and SEM

RS-EBS-M3-KF2

26.0

1.0

5.0

Hitachi S-Type

RS-EBS-M3-H2

9.8

1.2

2.7

JEOL K-Type metal ring - SEM - standard tip

RS-EBS-M3-LKS

28.0

1.2

8.0

JEOL K-Type metal ring - TEM - sharp tip

RS-EBS-M3-LKSH60S

28.0

1.2

8.0

Leica

RS-EBS-M3-CA

12.0

1.0

6.45

LEO1450 (except AEI conversions)

RS-EBS-M3-Z3

19.8

1.0

5.0

LEO TEM

RS-EBS-M3-Z3

19.8

1.0

5.0

Philips TEM and SEM (except XL-30)

RS-EBS-M3-KF2

26.0

1.0

5.0

Tescan

RS-EBS-M3-Z3

19.8

1.0

5.0

ZEISS DSM and TEM

RS-EBS-M3-Z3

19.8

1.0

5.0

Denka Schottky Emitters

                                                                                                                                                                                                 Return to Filaments Overview  
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Denka Schottky Emitter

Overview

DENKA TFE is a high performance ZrO/W emitter on tungsten with decreased work functions. Due to its brightness, which is 100 times higher than monocrystalline LaB6 cathodes, the DENKA TFE is most suitable for surface observation of materials and devices. In addition to high resolution imaging at lower accelerating voltages, the Denka TFE has an extremely stable emission current and long lifetime. The DENKA TFE is used in various electron beam application equipment such as semiconductor inspectors and electron beam lithography systems. A field emission emitter produces an electron beam that is smaller in diameter, more coherent and provides up to three orders of magnitude greater current density or brightness than can be achieved with conventional thermionic emitters. The result in both scanning and transmission electron microscopy is significantly improved signal-to-noise ratio and spatial resolution, and greatly increased emitter life and reliability compared with thermionic devices. Denka has a long standing history of providing reliable and quality products. The following is a technical drawing of the Denka emitter:

Denka Schottky Emitter Technial Data
Technical data
  • Operating temperature: ≤ 1850K. 1800K recommended.
  • Operating pressure: ≤ 1.3x10-6Pa (1x10-8Torr).
  • Operation ≤ 2.7x10-7Pa (2x10-9Torr) recommended.
  • Tip radius: 0.3 to 0.9μm. Range of tolerance ΔR=0.1 or 0.2μm. Remark: For tip radius range >
  • 0.9μm, contact
  • Filament current at 1800K:≤ 2.6A
SEM image of Denka TFE Tip
SEM image of the Denka TFE Tip

 

Rave Scientific offers two types of Denka emitters: The 174 and the 174 C. The 174 has a .6 micron tip +/- .1 micron and is applicable for high resolution low KeV performance and applications that require more current stability such as E-Beam Lithography and EDS. The 174C has a tip diameter of about .3 micron +/- .1 Micron and traditionally has been used in TEM systems or in situations where an end user is requiring higher brightness or slightly better imaging performance.

EM-Tec P45 fixed 45° pre-tilt holder for pin stubs/holders, Ø12.7x17mm, pin.

EM Tec P45 fixed 45 pre tilt holder for pin stubsholders 12.7x17mm pin

Product Part Number Price
EM-Tec P45 fixed 45° pre-tilt holder for pin stubs/holders, Ø12.7x17mm, pin RS-MN-10-002245 $53.32 each

Low profile SEM pin stub Ø12.7 diameter with 90° aluminium

rs mn 10 002114 5

Product Part Number Price
Low profile SEM pin stub Ø12.7 diameter with 90°, aluminium, pkg/50 RS-MN-10-002114-50 $139.99 each
Low profile SEM pin stub Ø12.7 diameter with 90°, aluminium, pkg/5 RS-MN-10-002114-5 $14.65 each

Low profile SEM pin stub Ø12.7 diameter with 1mm height aluminium

rs mn 10 002112 5

Low profile aluminum grade SEM pin stub ∅12.7 diameter with 1mm height for FEI or TESCAN Systems

Low profile aluminum grade SEM pin stub 12.7 diameter with 1mm height for FEI or TESCAN Systems

Low profile aluminum grade SEM pin stub ∅12.7 diameter with 90º of pre-tilt for FEI or TESCAN Systems.

Low profile aluminum grade SEM pin stub 12.7 diameter with 90º of pre-tilt for FEI or TESCAN Systems.

Product Part Number Price
Low profile SEM pin stub Ø12.7 diameter with 90°, aluminium, pkg/50 RS-MN-10-002114-50 $139.99 each
Low profile SEM pin stub Ø12.7 diameter with 90°, aluminium, pkg/5 RS-MN-10-002114-5 $14.65 each

FIB-SEM Pre-Tilt Speciman Holders

FIB-SEM Pre-tilt Specimen Holders

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FIB SEM pre tilt specimen holder category

Overview

When a user needs to position a sample perpendicular with the FIB column to allow for straight FIB milling into the surface of the sample, pre-tilt stub holders can be extremely useful. The pre-tilt angles are complementary to the angle of the FIB column and are custom designed for ZEISS, TESCAN and FEI FIB-SEM workstations. Three pre-tilt holders are available:



Available in the following types:

  • EM-Tec P38 fixed 38° tilt holder for FEI pin stubs. Used to pre-tilt samples 38° for FEI Dual Beam FIB systems. Size w.o. pin is Ø12.7x17mm.
  • EM-Tec P36 fixed angle 36° tilt holder for Zeiss pin stubs. Used to pre-tilt samples 36° for Zeiss CrossBeam FIB systems. Size w.o. pin is Ø12.7x17mm.
  • EM-Tec P35 fixed angle 35° tilt holder for standard and Tescan pin stubs. Used to pre-tilt samples 35° for Tescan FIBxSEM systems. Size w.o. pin is Ø12.7x17mm.

Product #StyleAngleFIB-SEMCapacitySize w/o pinStub holding method
RS-MN-10-002235 P35 35° Tescan Ø3.2mm pin Ø12.7x17mm Set Screw
RS-MN-10-002236 P36 36° ZEISS Ø3.2mm pin Ø12.7x17mm Set Screw
RS-MN-10-002238 P38 38° FEI Ø3.2mm pin Ø12.7x17mm Set Screw

Angled and Tilt holders

Angled and Tilted Holders

 Overview of Sample Holders              Carbon Tabs            Stage Adapters             Stub Adapters            Sample Preparation 

 

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Overview Picture copy

Overview

There are times when it is necessary to work with awkward samples that require pre-tilted holders. Rave Scientific offers the EM-Tec variable tilt and pre-tilt holders. These holders are useful for imaging samples under a pre-tilt angle without having to tilt the SEM stage. With these holders you can image previously mounted samples on standard pin stubs or Hitachi stubs at pre-set angles or any chosen angle. The tilt holders are particularly useful for table top SEMs without sample tilting facilities or for standard SEMs where high tilt would interfere with the pole piece or with detectors in the chamber. Sometimes, the pre-tilt holders are used to get full tilting from the SEM stage; with a pre-tilt 45° holder, the SEM stage only needs to be tilted another 45° to get a full 90° sample tilt. The available EM-Tec tilt holders are:


EM-Tec TV12 mini variable tilt mount allows 0-90° angle in a small sample mount; available with pin stub (#RS-MN-12-000241) or M4 thread (#RS-MN-12-000347) . The sample needs to be mounted on thetilting platform of this compact holder. Side engravings on the tilting platform assist in setting the desired tilt angle. Side engravings at 0, 30, 45, 70 and 90 degrees.

EM-Tec TV25 larger variable tilt holder allows 0-90° Angle for sample stubs or sample holders up Ø38mm. Larger stubs can be mounted, but tilting can be limited, depending on the SEM used. Compatible with both pin or Hitachi M4 threaded stubs or holders.Available with pin stub (#RS-MN-12-000248) or M4 thread (#RS-MN-12-000348)


EM-Tec GS10(#RS-MN-12-000110) – A swivel vise which covers a full 180 angle and can also be rotated with the stub. This is the ultimate holder for imaging cross sections at any desired angle. The swivel head size without clamping screws is only 16x16x14mm. The sample is clamped with the two clamping screws; the
swivel head can be locked in place with the tilt clamping screw. Made from gold plated brass.

EM-Tec PS15(#RS-MN-12-000211) swivel pin stub mount.The head of the mount is attached to the pin via a swivel hinge which allows for 90 degrees tilting each way. Excellent mount for SEMs without tilting facilities or when random tilt angled are needed. When the desired tilt angle is set, the top is secured with a socket cap screw.Top diameter is 15mm and height above pin is 15mm.

Product #StyleTilt AngleDimensions w/o pinStub compatibiityStage compatabiity
RS-MN-12-000241 TV12 0-90 14x14x14/20mm n.a 3.2mm pin stub
RS-MN-12-000347 TV12 0-90 14x14x14/20mm n.a M4 Thread
RS-MN-12-000248 TV25 0-90 35x25x10.5/29.5mm Pin stub / Hitachi M4 3.2mm pin stub
RS-MN-12-000348 TV25 0-90 35x25x10.5/29.5mm Pin stub / Hitachi M4 M4 Thread
RS-MN-12-000110 GS10 -90°-0-90° 28x16x27mm n.a. Clamp sample 3.2mm pin stub
RS-MN-12-000211 PS15 -90°-0-90° Ø15x15mm n.a. Mount Sample 3.2mm pin stub
RS-MN-10-002236 P36 36° (Zeiss FIB) Ø12.7x17mm 3.2mm pin stub 3.2mm pin stub
RS-MN-10-002238 P38 38° (FEI FIB) Ø12.7x17mm 3.2mm pin stub 3.2mm pin stub
RS-MN-10-002245 P45 45° Ø12.7x17mm 3.2mm pin stub 3.2mm pin stub
RS-MN-10-002246 P45M 45° Ø12.7x17mm Hitachi M4 thread 3.2mm pin stub
RS-MN-12-000345 H45P 45° Ø12.7x17mm 3.2mm pin stub M4 Thread
RS-MN-12-000341 H45 45° Ø12.7x17mm Hitachi M4 thread M4 Thread
RS-MN-10-002270 P70 70° EBSD Ø12.7x17mm 3.2mm pin stub 3.2mm pin stub
RS-MN-10-002274 P70M 70° EBSD Ø12.7x17mm Hitachi M4 thread 3.2mm pin stub
RS-MN-12-000370 H70P 70° EBSD Ø12.7x17mm 3.2mm pin stub M4 Thread
RS-MN-12-000371 H70 70° EBSD Ø12.7x17mm Hitachi M4 thread M4 Thread

 

 

 

Small sample holders

Small Sample Holders

 Overview of Sample Holders          SEM Stubs          Stage Adapters             Stub Adapters           Sample Preparation 

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Overview

Rave Scientific offers the EM-Tec stub based SEM sample holders which are small SEM sample holders based on (modified) SEM sample stubs. They have the same footprint as the original SEM sample stubs and are directly compatible with the SEM stage or SEM sample stub holder.  These affordable sample holders increase efficiency and reduce sample preparation time. Using sample holders reduces the use of conductive adhesives which can be a source of contamination. The EM-Tec stub based small sample holders formats are:   

  • Standard pin stub based compact sample holders
  • JEOL cylinder stub based sample holders
  • Hitachi M4 stub based sample

The pin stub based sample holders comprise the largest selection; they can be easily used on other SEM platforms by using the cost efficient EM-Tec SEM stub adapters. All EM-Tec compact SEM stub based SEM sample holders are precision machined from vacuum grade aluminum unless otherwise noted. Provided with set screws and allen keys.

 

Product Part Number Price
EM-Tec P35 fixed 35°pre-tilt holder for Tescan FIB systems, Ø12.7x17mm, pin RS-MN-10-002235 $53.32 each

YPS 174 Schottky Emitters

YPS Schottky TFE emitter modules with type 174 suppressor for Amray, Philips, Hitachi, ISI/ABT/Topcon, LEO, PHI, Riber, Tescan and Zeiss columns

YPS-184 Schottky Emitters

YPS 184 Schottky Emitter ModuleYPS Schottky TFE emitter modules with type 184 suppressor for FEI, Tescan and Camscan

YPS exchange Schottky TFE module assemblies

YPS exchange Schottky TFE module assembliesYPS exchange Schottky TFE module assemblies for FEI FEG and Sirion SFEG electron columns

Product Part Number Price
YPS TFE exchange module gun assembly for FEI FEG, exchange only RS-MN-14-FX4920 $6,750.00 each
YPS TFE exchange module gun assembly for FEI SFEG Sirion, exchange only RS-MN-14-FX4930 $6,750.00 each